Table I.

Values for feature geometry, Ni²⁺ cation and PEI suppressor concentrations and transport, and the Ni deposition and PEI adsorption/desorption kinetics for the simulations presented in this study. Parameters related to the Ni deposition kinetics and PEI adsorption and consumption are obtained from fitting voltammetric measurements.²³

Parameter	Name	Units	Value
Annular TSV inner radius	Ri	m	4 × 10−6
Annular TSV outer radius	Ro	m	9.5 × 10−6
Simulation cell radius	Rc	m	23 × 10−6
TSV height	h	m	56 × 10−6
Diffusion coefficient, suppressor	DPEI	m2/s	9.2 × 10−11
Diffusion coefficient,29 Ni2+	DNi	m2/s	6.6 × 10−10
Bulk concentration, Ni2+	$C_{Ni}^o$	mol/m3	1200
Boundary layer thickness for rotation rate ω = 200π rad/min (100 rpm)	δ	m	23 × 10−6
Saturation suppressor coverage	Γ	mol/m2	2.5 × 10−7
Suppressor adsorption kinetics	k+	m3/mol · s	1 × 104
Suppressor burial kinetics	k−	1/m	3 × 108
Unsuppressed Ni exchange rate constant	$j_0^o$	A/m2	1.3 × 10−2
Suppressed Ni exchange rate constant	$j_0^o$	A/m2	5.0 × 10−4
Unsuppressed Ni charge transfer coefficient	α0	-	0.4
Suppressed Ni charge transfer coefficient	α1	-	0.4
Ni ionic charge	n	-	2
Ni molar volume	Ω	m3/mol	6.59 × 10−6