Figure 4.
Sketch of the analogous Cu growth in different recessed features. The feature geometry and poloxamine Tetronic 701 concentration enable the bottom-up Cu filling, although convection may also affect deposition, as demonstrated in Fig. 3.
Sketch of the analogous Cu growth in different recessed features. The feature geometry and poloxamine Tetronic 701 concentration enable the bottom-up Cu filling, although convection may also affect deposition, as demonstrated in Fig. 3.