Table 3.

Selected, more important scanning parameters.

Parameter	Value
Source voltage (kV)	100
Source current (µA)	100
Image pixel size (µm)	21.38
Filter	Al 0.5 mm
Exposure (ms)	270
Rotation step (°)	0.32
Frame averaging	On (8)
Random movement	On (10)
Use 360 rotation	Yes
Geometrical correction	On