Table 1.
Peak-to-Peak Amplitudes | 25 µm | 100 µm | ||
---|---|---|---|---|
Absolute | Percentage | Absolute | Percentage | |
Deviation | 1.5 µm | 6.0% | 3.25 µm | 3.25% |
Maximum velocity | 73.8 µm/s | 303.9 µm/s | ||
Maximum acceleration | 463.9 µm/s2 | 1909.8 µm/s2 |
Peak-to-Peak Amplitudes | 25 µm | 100 µm | ||
---|---|---|---|---|
Absolute | Percentage | Absolute | Percentage | |
Deviation | 1.5 µm | 6.0% | 3.25 µm | 3.25% |
Maximum velocity | 73.8 µm/s | 303.9 µm/s | ||
Maximum acceleration | 463.9 µm/s2 | 1909.8 µm/s2 |