Table 6.

Fraction area of silicon sites after curve fitting.

Item No.	Fraction Area (%)
	Q1 and Q2	${\mathit{Q}}_4^4$	${\mathit{Q}}_4^3$	${\mathit{Q}}_4^2$	${\mathit{Q}}_4^1$
CM5S5-O-4M	38.84	51.8	7.39	1.61	0.36
CM5S5-O-6M	35.53	52.42	10.89	1.16	0