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. 2020 Aug 24;11(9):799. doi: 10.3390/mi11090799

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Top SEM micrograph of SiC cantilever resonators: (a,b) developed by Jiang et al. Reproduced with permission from [139] published by Elsevier and (c) developed by Jiao et al. Reproduced with permission from [140] published by Elsevier.