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. 2020 Aug 24;11(9):800. doi: 10.3390/mi11090800

Table 1.

Resistivity and temperature coefficient of resistance (TCR) of several complementary metal oxide semiconductor (CMOS)-compatible materials [12,75].

Material Resistivity (10−4 Ω∙cm, at 300 K) TCR (%/K)
undoped polysilicon 199 −0.085
n−polysilicon 62.2 −0.016
Al 0.03 0.38
Ti 1.2 0.25