. 2020 Sep 17;11(9):862. doi: 10.3390/mi11090862

Table 2.

Design parameters of the proposed multi-DoF MEMS gyroscope.

Parameters	Values
Overall device size	4.2 mm × 4.2 mm
Structural layer thickness $(t)$	25 µm
Mass value of the mass $(m_{1})$	2.5239 × 10⁻⁷ Kg
Mass value of the mass $(m_{2})$	1.1203 × 10⁻⁷ Kg
Mass value of the decoupling frame $(m_{f})$	3.234 × 10⁻⁸ Kg
Mass value of the mass $(m_{3 a})$	9.8125 × 10⁻⁸ Kg
Mass value of the mass $(m_{3 b})$	5.5343 × 10⁻⁸ Kg
Length of the parallel sensing plates $(l)$	500 µm
Width of the parallel sensing plates $(w)$	8 µm
Number of parallel sensing plates pair $(N_{s})$	120
Overlap length between the moving and fixed parallel sensing plates $(l_{0})$	450 µm
Smaller sense gap size $(d_{1})$	3 µm
Larger sense gap size $(d_{2})$	9 µm
Number of drive comb pairs $(N_{d})$	240
Width of drive combs $(w_{d})$	6 µm
Length of drive combs $(l_{d})$	120 µm
Gap between drive combs $(d)$	3 µm