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. 2020 Sep 17;11(9):862. doi: 10.3390/mi11090862

Table 3.

Comparison of the analytical and FEM analysis-based modal frequency values.

Mode Shape Analytical Model (kHz) FEM Model (kHz)
1st (Drive mode) 1.738 1.608
2nd (Sense mode) 1.800 1.707
6th (Drive mode) 3.507 3.329
7th (Sense mode) 3.867 3.709
10th (Drive mode) 4.960 4.822