Table 1.
Stage motion characterization results
| Stage speed (mm/s) | Acceleration region (mm) | Stable region (mm) | Deceleration region (mm) |
|---|---|---|---|
| 50 | 1.7 | 36.3 | 1.9 |
| 100 | 3.6 | 32.8 | 3.6 |
| 150 | 3.6 | 32.4 | 4.0 |
| 200 | 4.3 | 31.2 | 4.5 |
| 250 | 6.1 | 27.6 | 6.3 |
| 300 | 9.1 | 21.2 | 9.7 |
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