Table 2.
Summary of published state-of-the-art MEMS gyroscopes.
| Reference | [26] | [27] | [28] | [39] | This Work |
|---|---|---|---|---|---|
| Year | 2011 | 2016 | 2017 | 2020 | 2019 |
| Interface type | analog | analog + FPGA | mixed-signal | lock-in amplifier | mixed-signal |
| Power (mW) | 6.6 | 27.28 | 21 | - | 7.2 |
| Chip area (mm2) | 4.3 | 2.3 | 7.3 | - | 9.3 |
| Degrees of freedom | 2 | 3 | 2 | 3 | 3 |
| Dynamic range (°/s) | ±1000 | ±100 | 500 | - | ±200 |
| Bandwidth (Hz) | 160 | 80 | 480 | - | 100 |
| Nonlinearity (%) | 0.5 | 0.05 | - | - | 0.012 |
| Bias instability (°/h) | 22 | 1.2 | 5.5 | 11.32 | 2.1 |