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| K | OS | S | SOX | LS | ECO | |
|---|---|---|---|---|---|---|
| RMS roughness (nm) | 1.2 ± 0.4 | 1.5 ± 0.4 | 1.6 ± 0.6 | 0.5 ± 0.1 | 0.9 ± 0.4 | 0.5 ± 0.2 |
| thickness (nm) | 6.9 ± 0.8 | na | 11.3 ± 0.4 | 9.5 ± 0.9 | 5.3 ± 0.8 | 6.3 ± 0.6 |
| WCA (deg), thin films | 54 ± 3 | 58 ± 1 | 43 ± 7 | na | na | na |
| WCA (deg), pellets | 52 ± 2 | 56 ± 3 | 53 ± 3 | na | na | na |
na, not available.
