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Computation results for acoustic resonator loading with structured viscoelastic layer of period 100 nm with the coverage in a range 0.2–0.65 and a range of thicknesses 50–2000 nm. Frequency shift versus structure thickness (a) and slope of frequency shift versus thickness (hv) multiplied by coverage (Cov) for each structured layer (b). The frequency shift is calculated relative to the unloaded resonator frequency in air.
