. Author manuscript; available in PMC: 2020 Oct 29.

Published in final edited form as: IEEE Trans Instrum Meas. 2019;69:https://doi.org/10.1109/tim.2019.2961574.

TABLE III.

Measurement Results for a Square Si Wafer

	Measured value (A)			Theory (B)	(A – B)/B (%)	Standard Uncertainty (Excluding Point Contact Errors) (%)

	R_TL (kΩ)	R_vdP (kΩ)	${\bar{R}}_{π}$	${\bar{R}}_{π}$
DC	54.2953	2.6492	20.4954	20.5423	−0.228	0.010
1 kHz	48.3405	2.3505	20.5661	20.5423	0.116	0.055