Table 3.

The mean values of surface roughness parameters, measured for three samples at five different places

Area [pm2]	Sa [nm]	Sq [nm]	Sy [nm]	Sp [nm]	Sv [nm]	Sm [pm]
25.20	102.75 ± 6.03	134.92 ± 6.80	1187.40 ± 88.16	602.35 ± 29.08	−585.06 ± 31.04	−0.0031 ± 0.0001

Sa – the difference in height of each point compared to the arithmetical mean of the surface; Sq – the root mean square value of the ordinate values within the defined area. It is equivalent to the standard deviation of heights; Sp – the height of the highest peak within the defined area; Sv – the absolute value of the height of the largest pit (valley) within the defined area; Sm – the mean spacing between peaks.