Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Atomic force microscope (AFM) images of blanket copper wafers: (a) before CMP, root mean square (RMS) roughness 8.47 nm, (b) after CMP by colloidal silica abrasive, RMS roughness 4.27 nm, (c) after CMP by PS@SiO2 abrasive, RMS roughness 0.56 nm [16]. Reproduced with permission from [Lei Zhang et al.], [Applied Surface Science]; published by [Elsevier], 2011.
