U11	U22	U33	U12	U13	U23
Cl1	0.0610 (2)	0.03165 (18)	0.02096 (15)	−0.00237 (17)	0.01009 (15)	0.00035 (13)
O1	0.0498 (7)	0.0250 (5)	0.0223 (5)	−0.0041 (5)	0.0099 (5)	−0.0005 (4)
O2	0.0751 (9)	0.0223 (5)	0.0282 (5)	−0.0037 (5)	0.0160 (6)	0.0008 (4)
O3	0.0507 (7)	0.0332 (6)	0.0390 (6)	−0.0137 (5)	−0.0115 (5)	−0.0032 (5)
O4	0.0478 (6)	0.0249 (5)	0.0427 (6)	0.0058 (5)	0.0072 (5)	−0.0060 (5)
N1	0.0391 (6)	0.0201 (5)	0.0197 (5)	−0.0037 (5)	0.0015 (4)	−0.0007 (4)
N2	0.0325 (6)	0.0245 (5)	0.0209 (5)	−0.0020 (5)	0.0034 (4)	0.0025 (4)
C1	0.0240 (5)	0.0193 (5)	0.0199 (5)	−0.0003 (4)	0.0020 (4)	0.0011 (4)
C2	0.0258 (5)	0.0173 (5)	0.0215 (5)	−0.0005 (4)	0.0004 (4)	−0.0006 (4)
C3	0.0298 (6)	0.0222 (5)	0.0198 (5)	0.0002 (5)	0.0032 (5)	0.0012 (4)
C4	0.0324 (6)	0.0197 (5)	0.0274 (6)	−0.0006 (5)	0.0027 (5)	0.0033 (5)
C5	0.0341 (7)	0.0187 (5)	0.0289 (6)	0.0012 (5)	0.0029 (5)	−0.0017 (5)
C6	0.0300 (6)	0.0210 (5)	0.0228 (6)	0.0017 (5)	0.0037 (5)	−0.0021 (5)
C7	0.0302 (6)	0.0226 (6)	0.0209 (6)	−0.0012 (5)	0.0038 (5)	0.0029 (5)
C8	0.0375 (7)	0.0289 (7)	0.0227 (6)	−0.0030 (6)	0.0033 (5)	−0.0012 (5)
C9	0.0409 (8)	0.0219 (6)	0.0292 (7)	−0.0017 (6)	0.0016 (6)	−0.0021 (5)
C10	0.0349 (7)	0.0229 (6)	0.0268 (6)	−0.0034 (5)	0.0005 (5)	0.0030 (5)
C11	0.0247 (5)	0.0238 (5)	0.0218 (5)	−0.0027 (5)	−0.0009 (4)	0.0023 (5)
C12	0.0293 (6)	0.0307 (7)	0.0207 (6)	−0.0033 (5)	0.0006 (5)	0.0043 (5)
C13	0.0275 (6)	0.0346 (7)	0.0228 (6)	−0.0013 (5)	0.0025 (5)	−0.0005 (5)
C14	0.0346 (7)	0.0273 (6)	0.0313 (7)	0.0020 (6)	0.0062 (6)	−0.0014 (5)
C15	0.0356 (7)	0.0229 (6)	0.0291 (6)	0.0008 (5)	0.0051 (6)	0.0034 (5)
C16	0.0246 (5)	0.0234 (6)	0.0220 (6)	−0.0013 (4)	0.0012 (5)	0.0022 (5)
C17	0.0464 (9)	0.0483 (9)	0.0251 (7)	0.0006 (8)	0.0071 (6)	−0.0055 (7)