Fig. 5.

Experimental S-STEM imaging. A 128 × 128 probe positions dataset collected on FEI ${\mathrm{T}\mathrm{i}\mathrm{t}\mathrm{a}\mathrm{n}}^3$ 80-300 FEGTEM equipped with a pixelated EMPAD detector (4). The probe convergence semiangle was 15 mrad. (A) Reconstruction of BF signal from 0 to 7.5 mrad. (B) ABF signal reconstructed from annulus 7.5 to 15 mrad. (C) Averaged diffraction pattern for the whole sample. (D) $1°$ rotation S-STEM image. (E) $180°$ rotation S-STEM image. (F) Comparison of simulation and averaged (Upper Right) and nonaveraged (Lower Left) experiment for S-STEM for $180°$ rotation.