Table 1.
Author | Material | Discharge, Power (W) | Gasses | Pressure (Pa) | Deposition (D)/Etching (E) | XPS | AFM | ||
---|---|---|---|---|---|---|---|---|---|
C | O | Other | |||||||
[8] | PMMA disc | RF, 2000 | O2 | 0.75 | E | 40 | 38 | Al | >100 nm |
[8] | PEEK disc | RF, 2000 | O2 | 0.75 | E | 44 | 34 | Al | >100 nm |
[22] | PEEK foil | RF, 270 | Ar–O2 | N/A | E | 57 | 43 | SEM nanofibrils | |
[12] | ParyleneC film | RF, 1000 | O2 | 1.33 | E | 67 | 30 | Cl | 170 nm |
[13] | PVDF electrospun | MW, 200 | O2 | 80 | E | 57 | 7 | F | N/A |
[14] | PET foil | RF, 75 | O2 or He | 0.033 or 1.3 | E | 70 | 30 | 2 nm | |
[15] | PET foil | RF, 200 | O2 | 75 | E | 56 | 44 | 10 nm | |
[17] | PET foil | APPJ | N2 | 105 | E | 63 | 31 | N | N/A |
[20] | PLA non-woven | HF | Ar | 105 | E | 57 | 42 | N | 6 nm |
[16] | PP membrane | RF, 25 | O2 | 10 | E | 67 | 33 | SEM | |
[21] | Polyester/cellulose fabrics | DC | air | 105 | E | N/A | N/A | 200 nm | |
[30] | PTFE foil | RF, 100 | Ar, NH3, H2O | 30 | E | N/A | N/A | N/A | |
[23] | Coated C:H nanoparticles | RF, 40 | HMDSO, O2 | 4 | D | 5 | 60 | Si | 110 nm |
[24] | Coated Ag nanoparticles | RF, 40 | HMDSO, O2 | 4 | D | 5 | 58 | Si | 80 nm |
[26] | PDMSO | RF, 15 | O2 | 40 | E | 25 | 41 | Si | SEM microchannels |
[27] | HMDSO film | RF, 200 | O2 | 10 | E | 14 | 57 | Si | 45 nm |
[29] | Cotton textile | RF, 30 | MA | 20 | D | 74 | 25 | SEM |