Skip to main content
. 2020 Oct 30;11(11):981. doi: 10.3390/mi11110981

Figure 3.

Figure 3

(a) Fabricated silicon/glass chip with four loops of a spiral channel and a hydrofoil at the downstream of the spiral channel. Channels were patterned by using deep reactive-ion etching (DRIE) of silicon and sealed with glass by anodic bonding. The CTC and waste outlets and the sample inlet are indicated. (b) SEM image of the section with the hydrofoil.