Table 2.

Parameter set for micromirror design and modeling [18,19,20,21,22,23].

Parameter	Axis	Designation	Unit	Si (111)	AlN	Al
Layer thickness	z	hz	µm	20.0	0.6	0.5
Young’s modulus	x	Ex	GPa	168.9	308	68
	y	Ey	GPa	168.9	308	68
	z	Ez	GPa	168.9	308	68
Shear modulus	x, y	Gxy	GPa	66.9	128.3	28.6
	y, z	Gyz	GPa	57.8	128.3	28.6
	x, z	Gxz	GPa	57.8	128.3	28.6
Poisson number	x, y	νxy		0.262	0.2	0.32
	x, z	νxz		0.182	0.2	0.32
	y, z	νyz		0.182	0.2	0.32
Piezoelectric coefficient		d31	pm/V	-	−2	-