Figure 1.
Illustration of the step-by-step fabrication process of a PDMS chip by replica moulding: (1) Generating silicon master mould using photolithography; (2) Pouring of the mixture of PDMS prepolymer and curing agent into the master mould and allowing it to solidify; (3) Peeling of the solidified PDMS from the master mould and cutting it into an appropriate shape; (4) Punching the inlet and outlet holes; (5) Activating the PDMS and glass surface by plasma treatment for facilitating the bonding; (6) Binding and curing of PDMS chip bonded on glass ready to use.
