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. 2020 Nov 19;10(11):182. doi: 10.3390/bios10110182

Figure 1.

Figure 1

Illustration of the step-by-step fabrication process of a PDMS chip by replica moulding: (1) Generating silicon master mould using photolithography; (2) Pouring of the mixture of PDMS prepolymer and curing agent into the master mould and allowing it to solidify; (3) Peeling of the solidified PDMS from the master mould and cutting it into an appropriate shape; (4) Punching the inlet and outlet holes; (5) Activating the PDMS and glass surface by plasma treatment for facilitating the bonding; (6) Binding and curing of PDMS chip bonded on glass ready to use.