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Inorganic piezoelectric sensors for different medical applications.
| Material | Applications | Device Characteristics | Refs. | |
|---|---|---|---|---|
| Inorganic | (Na0.5, K0.5) NbO3 (NKN) films |
Mechano-electrical sensor | 10 Hz resonance | [63] |
| AlN | Monitoring of respiration and heartbeat | Tested over 0.1–10 Hz | [64] | |
| PZT | Eye fatigue | - | [65] | |
| Ceramics sensors—PZT | Vision correction | Sensitivity 0.1 × 10−2 N to 5 × 10−2 N 0.01–5 Hz |
[66] |
