Figure 6.

Comparison of pillars grown in experiment 2 from all three precursors a) and d) MeCpPtMe₃, b) and e) Pt(CO)₂Cl₂, and c) and f) Pt(CO)₂Br₂. The dwell times for each pillar were 0.5, 1, 1.5 and 2 ms (left to right) and this was repeated for 200 passes. a), b), and c) are deposited at 12 pA. This corresponds to electron doses of 7.5, 15, 22.5, and 30 × 10⁶ electrons. d), e) and f) are deposited at 38 pA, corresponding to electron doses of 24, 47, 71 and 95 × 10⁶ electrons, respectively. All scale bars are 500 nm.