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Pillar height a) and volume b) as functions of the number of electrons deposited at 38 pA from MeCpPtMe3, Pt(CO)2Cl2, and Pt(CO)2Br2. For comparison, the graph also contains the heights obtained from MeCpPtMe3 and Pt(CO)2Cl2 in experiment 1. The error bars originate from ±10 nm errors in size measurements taken manually from SEM images. The lines between the points serve as a guide to the eye and the inset shows an expansion of the data in the rectangular (red) area.
