Table 1.

Composition (in atom %), as determined by EDX, of deposits made in the SEM from the three platinum precursors. Deposition was done before (Before) and after (After) plasma cleaning the SEM chamber. The composition of deposits made in UHV were added for comparison.

	Pt(CO)2Cl2			Pt(CO)2Br2			MeCpPtMe3
Element	SEM		UHV [21]	SEM		UHV	SEM
	Before	After		Before	After		Before	After
C	55.4	50	—	65.4	66.4	6.5	69.5	67.3
Pt	20.2	25.8	37.6	12.1	11.3	35.9	18.4	18.8
Si	5.4	5.3	3.7	3.7	3.9	1.4	5.8	7.3
O	7.2	6.5	—	10.8	9.7	1.2	6.3	6.6
N	4.3	4.8	—	—	1.6	—	—	—
Br	—	—	—	8	7.0	54.9	—	—
Cl	7.5	7.6	58.7	—	—	—	—	—