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. 2020 Dec 3;15:223. doi: 10.1186/s11671-020-03454-2

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© The Author(s) 2020

Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — Design of micro-bridge structure coupled with split-ring resonators. a Sectional view of micro-bridge structure. b Split-ring with four openings. c Dual-ring structure. d A split-ring combined with an Al disk. e Dual-ring structure combined with an Al disk. f A single unit cell of THz microbolometer array illuminated by vertical incident light