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. Author manuscript; available in PMC: 2021 Oct 22.
Published in final edited form as: Phys Med Biol. 2020 Oct 22;65(21):21RM01. doi: 10.1088/1361-6560/ab9500

Figure 10.

Figure 10.

New technologies in detectors for PET/SPECT systems. (left) backside-illumination (BSI) detectors on a top layer combined with processing in the bottom layer in a 3D IC configuration: cross-section; (centre) photon detection probability in several BSI detectors and 3D ICs: note the different excess bias voltages (aka overvoltages) used; (right) photomicrograph of an array if single-photon avalanche diodes (SPADs) from the backside, while the bottom layer (not visible) is 3D-stacked in (Mata Pavia et al 2015, Lee et al 2018): the bottom layer is implemented in a more advanced CMOS technology node, thereby enabling extensive computations in situ.