Table 1.

Micro/Nano electrode arrays for bioanalysis applications.

Electrode array type	Fabrication	Analysis target	Measurement methods	Sensing performance	References
VACNT-NEA	Photolithography/glutamate dehydrogenase immobilization	Glutamate	Differential pulse voltammograms (DPV)	10 nM (LOD)	Gholizadeh et al., 2012
Enzyme-linked and self-referenced microelectrode arrays	Four Pt recording sites linked with ADA enzyme/ micropipette attachment	Extracellular adenosine	Constant potential amperometry	0.04 μM (in vivo LOD)	Hinzman et al., 2015
Au-coated vertical silicon nanowire electrode array (VSNEA)	Chemical vapor deposition (CVD)/ peptide immobilization and RNA functionalization	HIV-1 RRE RNA	DPV	1.513 fM (LOD)	Lee et al., 2016
Gold nanoscale interdigitated electrode (IDE) arrays	Nanoimprint and photolithography	DNA hybridization	Impedance spectroscopy	Dynamic detection range of 1–100 nM	Delle et al., 2018
Vertically aligned carbon nanofibers (VACNFs) arrays	PECVD/passivation and functionalization of Fc-hexapeptide substrates	Cathepsin B activity and concentration	AC voltammetry (ACV)	2.49 × 10−4 s−1 and 0.32 nM (LOD)	Song et al., 2019
Substrate-bound interdigitated array (IDA) nanoelectrodes.	Photolithography and RF-sputtering/ immobilization of mAb-cMyo	Cardiac myoglobin (cMyo).	Cyclic voltammetry (CV)	Linear detection range of 0.001–100 ng/mL 0.43 pg/mL (LOD)	Sharma et al., 2018
Cylindrical gold nano electrode arrays (CAuNE)	Laser interference lithography (LIL) and electrochemical deposition (ECD)	Dopamine (DA) in human neural cells	CV	5.83 μM (LOD)	Kim et al., 2018
Four-shank implantable micro-electrode array	Photolithography/ Pt/rGO nanocomposites modification onto the recording microelectrode sites	Synchronous DA levels and neural spike real-time detection	Amperometry	<20 nM (LOD)	Xiao et al., 2019