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. 2020 Nov 26;20(23):6759. doi: 10.3390/s20236759

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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First four vibrations modes of the FEM model of the pVEH microdevice: (a) first (38.5 Hz), (b) second (142.87 Hz), (c) third (371.65 Hz) and (d) fourth (2738.7 Hz) vibration mode.