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letter
. 2020 Nov 26;20(23):6759. doi: 10.3390/s20236759

Figure 14.

Figure 14

Schematic view of the variation of the resonant frequency of the pVEH microdevice caused by the modification of the thickness of seismic mass. Different applications of the pVEH microdevice can be obtained adjusting the thickness of seismic mass.