| 3D-DIC | Three-dimensional digital image correlation (3D-DIC) |
| AOI | Area of interest |
| CH | Conoscopic holography |
| CS | Confocal sensor |
| CSI | Computational shear interferometry |
| CLA | Chromatic light aberration phenomenon |
| CLSM | Confocal laser scanning microscopy |
| CMM | Coordinate measuring machine |
| CT | X-ray computed tomography |
| DIA | Digital image acquisition |
| EDS | Energy-dispersive X-ray spectrometry |
| EDXRF | Energy-dispersive X-ray fluorescence spectrometry |
| EMA | Electron microprobe analysis |
| FP | Fringe projection |
| FVM | Focus variation microscopy |
| GRT | Gamma-ray transmission |
| LAMQS | Laser ablation coupled to mass quadrupole spectrometry |
| LIBS | Laser-induced breakdown spectroscopy |
| MI | Moiré interferometry |
| ND | Neutron diffraction |
| OM | Optical microscopy |
| PIXE | Particle (proton)-induced X-ray emission |
| PS | Phase stepping |
| RBS | Rutherford backscattering spectrometry |
| XPS | X-ray photoelectron spectroscopy |
| XRD | X-ray diffraction |
| SEM | Scanning electron microscopy |
| SL | Structured light |
| SP | Speckle projection |
| SRXRF | Synchrotron radiation X-ray fluorescence spectrometry |
| TEM | Transmission electron microscopy |
| TPU | Temporal phase unwrapping |
| WD | Working distance, mm |
| Sa | Arithmetic mean deviation of the surface, µm |
| Sku | Kurtosis of the height distribution, - |
| Sp | Maximum height of summits, µm |
| Sq | Root-mean-square deviation of the surface, µm |
| Ssk | Skewness of the height distribution, - |
| St | Total height of the surface, µm |
| Sv | Maximum depth of valleys, µm |