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The XPS analysis of the as-deposited a-IGZO films with the different oxygen flow rates: (a) In 3d5/2 (b) Ga 2p3/2 (c) Zn 2p3/2 and (d) O1s (solid, dash, dot and dash–dot lines are indicated for OFR at 0 sccm, 1 sccm, 3 sccm and 6 sccm, respectively).
