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The electrical performance parameters of a-IGZO TFT with different sizes of channel width at an oxygen flow rate of 0 sccm.
| Channel Width (µm) |
Vth (V) |
Ion/Ioff |
SS (V/decade) |
µfet (cm2/V⋅s) |
|---|---|---|---|---|
| 500 | 0.41 | 2.2 × 106 | 0.18 | 11.9 |
| 800 | 0.65 | 1.6 × 106 | 0.22 | 9.4 |
| 1500 | 0.89 | 3.0 × 107 | 0.16 | 8.3 |
| 2000 | 0.90 | 1.1 × 107 | 0.13 | 7.4 |
