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. 2020 Nov 27;10(12):2357. doi: 10.3390/nano10122357

Table 3.

The electrical performance parameters of a-IGZO TFT with different sizes of channel width at an oxygen flow rate of 1 sccm.

Channel Width
(µm)
Vth
(V)
Ion/Ioff SS
(V/decade)
µfet
(cm2/V⋅s)
500 0.54 2.6 × 106 0.15 12.3
800 0.66 1.0 × 107 0.17 10.8
1500 0.77 1.2 × 106 0.13 9.4
2000 0.86 1.5 × 107 0.11 9.1