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. 2020 Nov 28;11(12):1051. doi: 10.3390/mi11121051

Figure 2.

Figure 2

Various microelectromechanical system (MEMS) probe designs. (a) A typical side-view scanning probe. (b) A typical forward-view probe with a beam folding mirror to fold the optical beam. (c) A novel forward-view probe with two vertical mirrors on a silicon substrate. (d) A top view of the novel forward-view probe, showing the light path inside the probe.