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. 2020 Nov 28;11(12):1051. doi: 10.3390/mi11121051

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Illustration of the electrothermal bimorphs. (a) An Al/SiO₂ bimorph cantilever. (b) A double S-shaped inverted-series-connected (ISC) bimorph actuator.