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. 2020 Nov 28;11(12):1051. doi: 10.3390/mi11121051

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Top view of the MEMS chip structure. (a) A structural design with the beam folding mirror as the first incident mirror. (b) A structural design with scanning mirror as the first incident mirror.