Table 2.
Elemental composition (at. %) of the PLD targets and films, estimated by Energy Dispersive X-ray (EDX) quantitative analyses.
| Sample Code | Elemental Composition (at. %) | ||||||
|---|---|---|---|---|---|---|---|
| Ca | P | Na | Mg | Si | S | Ca/P Ratio | |
| HAsyn target | 62.5 ± 0.9 | 37.5 ± 0.8 | – | – | – | – | 1.67 ± 0.06 |
| HAsyn film | 61.4 ± 0.2 | 38.6 ± 0.3 | – | – | – | – | 1.59 ± 0.02 |
| Spa-BCP target | 58.9 ±3.1 | 36.2 ± 1.6 | 2.9 ± 1.1 | 1.5 ± 0.6 | 0.2 ± 0.06 | 0.3 ± 0.07 | 1.63 ± 0.16 |
| Spa-BCP film | 57.7 ± 1.2 | 38.4 ± 0.7 | 2.1 ± 0.2 | 1.1 ± 0.04 | 0.2 ± 0.03 | 0.5 ± 0.1 | 1.50 ± 0.01 |
| Sal-BCP target | 60.0 ± 0.7 | 38.1 ± 0.6 | 1.0 ± 0.1 | 0.8 ± 0.1 | 0.1 ± 0.02 | – | 1.57 ± 0.04 |
| Sal-BCP film | 58.2 ± 0.5 | 39.5 ± 0.5 | 1.2 ± 0.2 | 0.9 ± 0.1 | 0.2 ± 0.02 | – | 1.47 ± 0.03 |