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. 2020 Dec 16;10(12):2531. doi: 10.3390/nano10122531

Figure 5.

Figure 5

TEM images of a cross-section view for (a) a whole unmodified 15×(Ti/Zr)/Si multilayer thin film, (b) part of an unmodified structure at high magnification, (c) a whole laser-modified 15×(Ti/Zr)/Si multilayer thin film, and (d) part of a modified structure close to the surface.