Table 1.
Gas sensing with 2D TMDC-based FET sensors: device structure and sensing performance
| Gas sensing | FET channel | LOD | Sensitivity (response) | Response/recovery time | References | |
|---|---|---|---|---|---|---|
| Oxidizing gas | NO2 | MoS2 | 20 ppb | –/60 min | [39] | |
| MoS2 (1L, CVD) | 20 ppb | > 20% | 10 min/– | [40] | ||
| MoS2@CNT | 1 ppm | 366 s/1950s | [93] | |||
| MoS2/SnO2 | 0.5 ppm | ~ 0 6% | 6.8 min/2.7 min | [12] | ||
| MoS2/PtNP | 2 ppb | 3 (SNR) | > 30 min/> 30 min | [83] | ||
| MoS2@WS2 | 50 ppm | 26.12% | 1.6 s/27.7 s | [107] | ||
| MoS2/graphene | 0.2 ppm | 19% | 6.5 s/6.5 s | [105] | ||
| WS2 (4L) | 25 ppm | 8.7% | [15] | |||
| WS2xSe2-2x | 180% (10 ppm) | [103] | ||||
| WS2/AgNW | 1 ppm | 32% | [15] | |||
| WS2/ZnS | 5 ppm | 32.5% | 4 s/– | [106] | ||
| WS2/WO3 | 100 ppm | [38] | ||||
| WS2/MOF | 5 ppm | 48.2% | [108] | |||
| WSe2 (LPE) | 50 ppb | 5.06% | 50 s /1050 s | [41] | ||
| WSe2 (3L, ALD) | 10 ppm | 6.5 min/43 s | [98] | |||
| MoTe2 | 12 ppb | 1.15% | –/10 min | [42] | ||
| α-MoTe2 | 70 ppb | 13% | 15 s/– | [43] | ||
| MoSe2 (CVD) | 10,300 ppm | –/30 min | [13] | |||
| NbS2 | 241 ppb | 3000 s/9000 s | [101] | |||
| NO | MoS2 (1L) | 0.3 ppm | 50% | 5 s/– | [88] | |
| MoS2 (2L) | 0.8 ppm | > 2.5 min/– | [95] | |||
| O2 | MoS2 (3L, CVD) | 100 ppm | 4.84% | 18 s/47 s | [155] | |
| SO2 | MoS2/Ni | 5 ppm | 7.4% | 50 s/56 s | [156] | |
| Reducing gas | NH3 | MoS2 (1L, CVD) | 1 ppm | > 40% | 5–9 min/– | [40] |
| MoS2 (CVD) | 300 ppb | 4.2 (SNR) | 15 s | [157] | ||
| MoS2/ZnO | 50 ppm | 46.2% | 10 s/11 s | [158] | ||
| MoS2/TiO2 QDs | 250 ppm | 43.72% | –/ ~ 174 s | [159] | ||
| WS2 | 5 ppm | – | 120 s/150 s | [112] | ||
| WS2 | 1.4 ppm | 3.3 (SNR) | > 5 s/– | [111] | ||
| WS2/WO3 | 1 ppm | 1.16 | 15 min/28.9 min | [38] | ||
| MoTe2 | 1 ppm | 2.76% | –/10 min | [42] | ||
| α-MoTe2 | 70 ppb | 101% | 1 s/2 s | [43] | ||
| WSe2 (3L, ALD) | 20 ppm | –/20 s | [98] | |||
| H2 | MoS2 (1L) | 0.1%-90% | 7 min/67 min | [160] | ||
| MoS2/Si | 1 ppm | 30.4% | ~ 400 s/ ~ 450 s | [36] | ||
| WS2/PtNP | 7.8 ppm | 1.14 | 119 s/370 s | [37] | ||
| WS2/WO3 | 1 ppm | 1.15 | 5.9 min/27.2 min | [38] | ||
| VOCs | Acetone | MoS2 | 1 ppm | 10 s/– | [18] | |
| MoS2/rGO | 10 ppm | 73 s/– | [161] | |||
| WS2 | 5.6 ppm | [121] | ||||
| WS2 (2L) | 0.5–10 ppm | [15] | ||||
| MoTe2 | ~ 0.2 ppm | 3 (SNR) | [19] | |||
| Triethylamine | MoS2 (1L) | 1 ppm | 15 s/30 s | [118] | ||
| MoS2 | 1 ppm | ~ 70% | ~ 50 s/ ~ 100 s | [119] | ||
| MoS2 (1T/2H contact) | 80 ppb | ~ 20 s/ ~ 50 s | [120] | |||
| Ethanol | MoS2 | 10 ppm | 10 s/- | [18] | ||
| MoS2-MUA | 100 ppm | 10 s/- | [18] | |||
L layer, LPE liquid-phase exfoliated, ALD atomic layer deposition, QDs quantum dots, SNR signal -to-noise ratio, rGO reduced graphene oxide, MUA mercaptoundecanoic acid