Table 2.

Bias of ACG, TAR, ICG relative to IR

Bias %	ACG	ICG	TAR
Defect1 Line1	1.32%	0.00%	14.47%
Defect1 Line2	3.96%	5.94%	2.97%
Defect1 Line3	25.00%	4.17%	12.50%
Defect1 Line4	3.67%	0.92%	31.19%
Defect1 Line5	10.00%	1.33%	6.67%
Defect2 Line1	16.18%	1.47%	33.82%
Defect2 Line2	6.67%	13.33%	16.67%
Defect2 Line3	0.00%	27.78%	14.81%
Defect2 Line4	20.00%	22.86%	34.29%
Defect2 Line5	13.75%	1.25%	21.25%
Defect3 Line1	20.00%	4.00%	47.00%
Defect3 Line2	5.45%	49.09%	3.64%
Defect3 Line3	6.59%	18.68%	9.89%
Defect3 Line4	4.00%	4.00%	22.00%
Defect3 Line5	8.87%	0.81%	29.03%
Average	9.70%	10.38%	20.01%