Table 1. X-ray Reflectivity Fitting Parameters of Thin Films Prepared by Different Spin-Coating Concentrations and PVD Deposition Thicknesses Together with the Roughness from the AFM Measurements σRMS and the Crystal Height from the XRD Peak Width Analysis.
| spin
coating | |||||
|---|---|---|---|---|---|
| concentration (g/L) | density (g/cm3) | thickness (Å) | roughness (Å) | crystal height (Å) | AFM σRMS (Å) |
| 0.7 | 1.0 | 25 | 8 | 6 | |
| 1 | 1.2 | 50 | 3 | 5 | |
| 2 | 1.2 | 93 | 15 | 10 | |
| 3 | 1.1 | 140 | 22 | 140 | |
| 5 | 1.0 | 221 | 30 | 200 | 63 |
| physical
vapor deposition | |||||
|---|---|---|---|---|---|
| nominal thickness (Å) | density (g/cm3) | thickness (Å) | roughness (Å) | crystal height (Å) | AFM σRMS (Å) |
| 60 | 0.7 | 24 | 4 | 26 | |
| 94 | 1.0 | 87 | 23 | 33 | |
| 133 | 1.0 | 115 | 45 | 51 | |
| 307 | 1.1 | 270 | 36 | 280 | 22 |