|
x
|
the displacement of the actuator |
|
S
3
|
the strain of the piezoelectric stack |
|
T
3
|
stress |
|
d
33
|
piezoelectric constant |
|
E
3
|
external electric field |
|
|
short circuit elastic compliance coefficient with constant electric field |
|
h
|
the thickness of a single piezoelectric ceramic sheet |
|
n
|
the number of layers of piezoelectric laminated ceramics |
|
l
|
the length of the piezoelectric ceramic sheet |
|
b
|
the width of the piezoelectric ceramic sheet |
|
F
out
|
the direction output force of piezoelectric stack |
|
ua
|
the drive voltage of the piezoelectric stack |
|
kamp
|
series circuit of gain |
|
R
|
resistance |
|
Ca
|
capacitors |
|
uc
|
the output voltage of driving amplifier |
|
q
|
the charge produced by quartz |
|
A
|
the area of the piezoelectric quartz |
|
εr
|
the relative permittivity of quartz |
|
ε
0
|
the dielectric constant of air |
|
m
|
the equivalent mass of moving part of piezoelectric sensor-actuator system |
|
cf
|
the equivalent viscosity coefficient of actuator structure |
|
kf
|
the stiffness coefficient of actuator |
|
ka
|
the equivalent stiffness of preload |