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letter
. 2021 Jan 3;21(1):269. doi: 10.3390/s21010269
x the displacement of the actuator
S 3 the strain of the piezoelectric stack
T 3 stress
d 33 piezoelectric constant
E 3 external electric field
S33E short circuit elastic compliance coefficient with constant electric field
h the thickness of a single piezoelectric ceramic sheet
n the number of layers of piezoelectric laminated ceramics
l the length of the piezoelectric ceramic sheet
b the width of the piezoelectric ceramic sheet
F out the direction output force of piezoelectric stack
ua the drive voltage of the piezoelectric stack
kamp series circuit of gain
R resistance
Ca capacitors
uc the output voltage of driving amplifier
q the charge produced by quartz
A the area of the piezoelectric quartz
εr the relative permittivity of quartz
ε 0 the dielectric constant of air
m the equivalent mass of moving part of piezoelectric sensor-actuator system
cf the equivalent viscosity coefficient of actuator structure
kf the stiffness coefficient of actuator
ka the equivalent stiffness of preload