Figure 1.

The comparison between the classical equivalent-width beam and the proposed four-layer variable width beam, and four-layer films are Al electrode, AlN piezoelectric layer, silicon oxide (SiO₂), and the silicon substrate. (a) The geometry of equivalent-width beam; (b) the geometry of proposed variable width beam, the width gradually decreases from bottom to top; (c,d) tip displacement and fundamental frequency versus the width of the piezoelectric layer when the piezoelectric bimorph consists of Si with a width of 70 µm AlN.