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Measurements of S21 of the fabricated piezoelectric cantilever resonator, the 1st, 2nd, and 3rd-order resonance frequency are 11.463 kHz, 72.208 kHz, and 202.701 kHz, respectively. (a–c) The frequency–amplitude response curve of the 1st, 2nd, and 3rd-order resonance mode; (d–f) the frequency–phase response curve of the 1st, 2nd, and 3rd-order resonance mode.
