Table 2.

Geometry and material parameters of the piezoelectric resonator.

Layer	t (µm)	b (µm)	L (µm)	Y (GPa)	$\mathit{\upsilon }$	ρ (kg/m3)	ε
1: Si	10	70	1100	160	0.22	2320	4.5
2: SiO2	0.2	60	1100	70	0.17	2700	4.2
3: AlN	0.5	50	1100	345	0.32	3300	9
4: Al	1.0	30	1100	70	0.33	2700	-
	Piezoelectric coupling coefficient: d31 = −1.9159 × 10−12 C/N