Table 4.

Geometry and material parameters of the piezoelectric resonator.

Layer	t (µm)	L (µm)	Y (GPa)	$\mathit{\upsilon }$	ρ (kg/m3)	$\mathit{\epsilon }$
1: Si	10	1000	160	0.22	2320	4.5
2: Al	0.2	1000	70	0.33	2700	-
3: AlN	0.5	1000	345	0.32	3300	9
4: Al	1.0	1000	70	0.33	2700	-
Piezoelectric coupling coefficient: d31 = −1.9159 × 10−12 C/N