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. 2020 Dec 25;21(1):87. doi: 10.3390/s21010087

Table 5.

Comparison of tip displacement of predecessor’s model and newly proposed model.

Test b1
(µm)
b2
(µm)
b3 (µm) b4
(µm)
Ref [11]
(nm)
Ref [17]
(nm)
Proposed
(nm)
FEM
(nm)
Error
(%)
#1 70 70 70 70 88.42 78.83 88.42 88.77 0.39
#2 70 70 70 20 93.04 23.70 26.58 27.70 4.04
#3 70 70 20 20 35.08 31.28 35.08 34.35 2.13
#4 70 20 20 20 35.82 31.94 35.82 34.98 2.40
#5 70 50 30 10 50.50 15.01 16.83 17.75 5.18
#6 70 60 50 10 74.41 13.32 14.94 15.89 5.98