Table 7.
Tip displacement when the second layer is SiO2 and the substrate grounded.
| Test | b1 (µm) | b2 (µm) | b3 (µm) | b4 (µm) | Proposed (nm) | FEM (nm) | Error (%) |
|---|---|---|---|---|---|---|---|
| #1 | 70 | 70 | 70 | 70 | 47.61 | 46.07 | 3.34 |
| #6 | 70 | 60 | 50 | 10 | 8.04 | 8.54 | 5.85 |
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